Electronic Device Group (Suzukakedai)

Shared use and unified operation of clean rooms and related laboratories for semiconductor device research on the Suzukakedai Campus

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Features

The clean room used for semiconductor device research on the Suzukakedai Campus, the related shared use laboratories, and the many research facilities installed therein are shared, and the whole system is operated in a unified manner so that many users can efficiently use the necessary research equipment.

Since there are many laboratories involved in research on the fabrication of semiconductor electronic devices and optical devices on campus, there are about 70 experimental facilities that are shared here, and are fully equipped to cover most of the device fabrication process and measurement evaluation.

In order to ensure that many users can use these shared facilities efficiently and safely, we hold regular workshops for laboratory use at each laboratory site, and provide technical support for new users of each facility. A system is in place for introductory instructions by technical staff members and student RAs.

Overview and Agenda

In addition to being able to make more effective use of individual research equipment, for researchers, the options for machining processes and measurement evaluation methods that can be used in production experiments will expand, expanding the scope of experimental research and increasing the possibility of efficiently leading to higher-level research results.

It is also very effective for researchers in other fields such as science and biology who do not have equipment or facilities in this field to use this shared system when they want to develop their research results and ideas through device prototyping. In the same way, this shared system can contribute to the early launch of research by newly appointed young researchers and researchers who are newly starting research at the university through joint research in Japan and overseas.

By integrally managing and operating a large number of equipment and facilities, space utilization efficiency is increased and maintenance is performed efficiently. Furthermore, we are striving to ensure a higher level of safety by systematically implementing safety education throughout the facility.

Inquiries about usage, etc.

Please email the group representative below.
　Laboratory for Future Interdisciplinary Research of Science and Technology (FIRST), Institute of Innovative Research (IIR) :　Kazuo Tsutsui
　Email: ktsutsui[at]ep.titech.ac.jp TEL/FAX 045(924)5462　(Please replace [at] to @.)

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